SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 28 August 2016)] Advances in Metrology for X-Ray and EUV Optics VI - Ray-tracing as a tool for efficient specification of beamline optical components
Assoufid, Lahsen, Ohashi, Haruhiko, Asundi, Anand K., Pedreira, P., Sics, I., Llonch, M., Ladrera, J., Ribó, Ll., Colldelram, C., Nicolas, J.Volume:
9962
Year:
2016
Language:
english
DOI:
10.1117/12.2237599
File:
PDF, 361 KB
english, 2016