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SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 25 June 2017)] Optical Measurement Systems for Industrial Inspection X - Vibration compensated high-resolution scanning white-light Linnik-interferometer
Lehmann, Peter, Osten, Wolfgang, Albertazzi Gonçalves, Armando, Tereschenko, Stanislav, Lehmann, Peter, Gollor, Pascal, Kuehnhold, PeterVolume:
10329
Year:
2017
Language:
english
DOI:
10.1117/12.2270226
File:
PDF, 631 KB
english, 2017