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Electrical properties of SiN x films with embedded CNTs for MEMS capacitive switches
Koutsoureli, M., Stavrinidis, G., Birmpiliotis, D., Konstantinidis, G., Papaioannou, G.Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2017.07.041
Date:
July, 2017
File:
PDF, 1.50 MB
english, 2017