Self-Directed, Self-Improving Control of a Molecular Beam Epitaxy Process
Currie, Kenneth R., LeClair, Steven R., Patterson, Oliver D.Volume:
25
Language:
english
Journal:
IFAC Proceedings Volumes
DOI:
10.1016/s1474-6670(17)49469-9
Date:
October, 1992
File:
PDF, 1.33 MB
english, 1992