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AIP Conference Proceedings [AIP SOLID STATE PHYSICS: PROCEEDINGS OF THE 57TH DAE SOLID STATE PHYSICS SYMPOSIUM 2012 - Indian Institute of Technology, Bombay, Mumbai, India (3–7 December 2012)] - Hydrogen implantation-induced layer transfer of silicon using direct wafer bonding
Dadwal, U., Chandra, S., Kumar, P., Kanjilal, D., Singh, R.Year:
2013
Language:
english
DOI:
10.1063/1.4791225
File:
PDF, 180 KB
english, 2013