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AIP Conference Proceedings [American Institute of Physics 5TH NATIONAL CONFERENCE ON THERMOPHYSICAL PROPERTIES: (NCTP‐09) - Baroda (India) (7–9 October 2009)] - A versatile MEMS bimorph actuator with large vertical displacement and high resolution: Design and fabrication process
Rangra, Aarushee, Maninder, K., Soni, Shilpi, Rangra, K. J.Volume:
1249
Year:
2010
Language:
english
DOI:
10.1063/1.4945121
File:
PDF, 1.38 MB
english, 2010