Improving the Yield and Lifetime of Microfabricated Sensors for Harsh Environments
Blair, E.O., Corrigan, D.K., Levene, H.J., Schmueser, I., Terry, J.G., Smith, S., Mount, A.R., Walton, A.J.Year:
2017
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2017.2715377
File:
PDF, 1.45 MB
english, 2017