![](/img/cover-not-exists.png)
Effect of Guanidinium Ions on Ruthenium CMP in H 2 O 2 -Based Slurry
Du, Yichen, Wang, Chenwei, Zhou, Jianwei, Zhang, Wenqian, Ji, Jun, Han, Linan, Li, YanleiVolume:
6
Year:
2017
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0131708jss
File:
PDF, 1.04 MB
english, 2017