[ECS ISTC/CSTIC 2009 (CISTC) - Shanghai, China (March 19 - March 20, 2009)] ECS Transactions - Hot-Spots Aware Inverse Lithography Technology
Yang, Yiwei, Shi, Zheng, Shen, Shanhu, Xie, ChunleiYear:
2009
Language:
english
DOI:
10.1149/1.3096473
File:
PDF, 1.48 MB
english, 2009