![](/img/cover-not-exists.png)
[AIP ION IMPLANTATION TECHNOLOGY: 17th International Conference on Ion Implantation Technology - Monterey (California) (8–13 June 2008)] AIP Conference Proceedings - Junction Photovoltage Metrology and High Resolution Mapping of Ion Implants Electrically Isolated from the Wafer Surface
Korsós, Ferenc, Kis-Szabo, Krisztian, Don, Eric, Pap, Aron, Pavelka, Tibor, Laviron, Cyrille, Pfeffer, Marcus, Seebauer, Edmund G., Felch, Susan B., Jain, Amitabh, Kondratenko, Yevgeniy V.Year:
2008
Language:
english
DOI:
10.1063/1.3033568
File:
PDF, 707 KB
english, 2008