[AIP ION IMPLANTATION TECHNOLOGY: 17th International...

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[AIP ION IMPLANTATION TECHNOLOGY: 17th International Conference on Ion Implantation Technology - Monterey (California) (8–13 June 2008)] AIP Conference Proceedings - Ultra-Shallow Junctions Fabrication by Plasma Immersion Implantation on PULSION® Followed by Laser Thermal Processing

Torregrosa, Frank, Etienne, Hasnaa, Sempere, Guillaume, Mathieu, Gilles, Roux, Laurent, Vervisch, Vanessa, Delaporte, Philippe, Sarnet, Thierry, Pap, Aron, Kis-Szabo, Krisztián, Pavelka, Tibor, Grosj
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Year:
2008
Language:
english
DOI:
10.1063/1.3033665
File:
PDF, 862 KB
english, 2008
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