Preparation and structural properties of thin carbon films...

Chinese Physics B 2016 / 07 Vol. 25; Iss. 7

Preparation and structural properties of thin carbon films by very-high-frequency magnetron sputtering

Gao, Ming-Wei, Ye, Chao, Wang, Xiang-Ying, He, Yi-Song, Guo, Jia-Min, Yang, Pei-Fang
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Volume:
25
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/25/7/075202
Date:
July, 2016
File:
PDF, 2.21 MB
english, 2016
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