Gas rarefaction effects during high power pulsed magnetron sputtering of groups IVb and VIb transition metals in Ar
Greczynski, Grzegorz, Zhirkov, Igor, Petrov, Ivan, Greene, J. E., Rosen, JohannaVolume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4989674
Date:
November, 2017
File:
PDF, 1.75 MB
english, 2017