ULSI Semiconductor Technology Atlas (Tung/ULSI Semiconductor) || Silicides, Polycide, and Salicide
Tung, Chih-Hang, Sheng, George T. T., Lu, Chih-YuanYear:
2003
Language:
english
DOI:
10.1002/0471668796.ch7
File:
PDF, 1.53 MB
english, 2003