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Direct Liquid Injection − Low Pressure Chemical Vapor Deposition of Silica Thin Films from Di-t-butoxydiacetoxysilane
Vervaele, Mattias, De Roo, Bert, Debehets, Jolien, Sousa, Marilyne, Zhang, Luman, Van Bilzen, Bart, Seré, Stephanie, Guillon, Herve, Rajala, Markku, Won Seo, Jin, Locquet, Jean-PierreLanguage:
english
Journal:
Advanced Engineering Materials
DOI:
10.1002/adem.201700425
Date:
July, 2017
File:
PDF, 1.06 MB
english, 2017