Annealing of the sputtered AlN buffer layer on...

physica status solidi (b) 2017 / 07

Annealing of the sputtered AlN buffer layer on r -plane sapphire and its effect on a -plane GaN crystalline quality

Jinno, Daiki, Otsuki, Shunya, Niimi, Teruyuki, Sugimori, Shogo, Daicho, Hisayoshi, Iwaya, Motoaki, Takeuchi, Tetsuya, Kamiyama, Satoshi, Akasaki, Isamu
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Language:
english
Journal:
physica status solidi (b)
DOI:
10.1002/pssb.201600723
Date:
July, 2017
File:
PDF, 1.05 MB
english, 2017
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