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Surface-Localized Sealing of Porous Ultralow- k Dielectric Films with Ultrathin (
Yoon, Seong Jun, Pak, Kwanyong, Nam, Taewook, Yoon, Alexander, Kim, Hyungjun, Im, Sung Gap, Cho, Byung JinLanguage:
english
Journal:
ACS Nano
DOI:
10.1021/acsnano.7b01998
Date:
July, 2017
File:
PDF, 1.29 MB
english, 2017