[IEEE 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2017.5.15-2017.5.18)] 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Chasing ghosts: How an SRAM detected the subtle impact of stray light
Lucarini, Stephen, Dirahoui, Bachir, Hafer, Richard, Weng, Weihao, Safran, Laura, Pendyala, Sweta, Barth, Karl, Brunner, Timothy, Song, Zhigang, Engel, Brett, Clark, David, He, Keliang, Gow, Cathy, FrYear:
2017
Language:
english
DOI:
10.1109/ASMC.2017.7969187
File:
PDF, 824 KB
english, 2017