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[IEEE 2017 IEEE International Interconnect Technology Conference (IITC) - HsinChu, Taiwan (2017.5.16-2017.5.18)] 2017 IEEE International Interconnect Technology Conference (IITC) - Layout based Monte-Carlo simulation (LBMCS) for complex back end of line (BEOL) design rule study
Shao, Dongbing, Clevenger, L. A., Chen, Shyng-Tsong, Wong, RobertYear:
2017
Language:
english
DOI:
10.1109/IITC-AMC.2017.7968938
File:
PDF, 272 KB
english, 2017