[ASME ASME 2009 International Manufacturing Science and Engineering Conference - West Lafayette, Indiana, USA (October 4–7, 2009)] ASME 2009 International Manufacturing Science and Engineering Conference, Volume 2 - Precision XY Positioning Stage With Coupled Flexures and Piezo Actuators for Avoiding Parasitic Tilt Error
Hwang, Donghyun, Lee, Moon G., Kim, Hyun-Uk, Lee, Soo-Hun, Jeong, JaehwaYear:
2009
Language:
english
DOI:
10.1115/msec2009-84094
File:
PDF, 293 KB
english, 2009