Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2015 / 11 Vol. 33; Iss. 6
Simulation study on defect annihilation dynamics in directed self-assembly lithography
Kodera, Katsuyoshi, Kanai, Hideki, Sato, Hironobu, Seino, Yuriko, Kobayashi, Katsutoshi, Kasahara, Yusuke, Kubota, Hitoshi, Kihara, Naoko, Kawamonzen, Yoshiaki, Minegishi, Shinya, Miyagi, Ken, ShiraisVolume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4935254
Date:
November, 2015
File:
PDF, 2.71 MB
english, 2015