Design, fabrication and characterization of flexible MEMS...

Sensors and Actuators A: Physical 2017 / 08 Vol. 263

Design, fabrication and characterization of flexible MEMS accelerometer using multi-Level UV-LIGA

Mahmood, Md. Sohel, Celik-Butler, Zeynep, Butler, Donald P.
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Volume:
263
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2017.07.007
Date:
August, 2017
File:
PDF, 4.10 MB
english, 2017
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