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Design, fabrication and characterization of flexible MEMS accelerometer using multi-Level UV-LIGA
Mahmood, Md. Sohel, Celik-Butler, Zeynep, Butler, Donald P.Volume:
263
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2017.07.007
Date:
August, 2017
File:
PDF, 4.10 MB
english, 2017