![](/img/cover-not-exists.png)
[IEEE 2017 25th Mediterranean Conference on Control and Automation (MED) - Valletta, Malta (2017.7.3-2017.7.6)] 2017 25th Mediterranean Conference on Control and Automation (MED) - Product quality prediction using alarm data : Application to the semiconductor manufacturing process
Melhem, Mariam, Ananou, Bouchra, Ouladsine, Mustapha, Combal, Michel, Pinaton, JacquesYear:
2017
Language:
english
DOI:
10.1109/MED.2017.7984303
File:
PDF, 717 KB
english, 2017