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Ion Beam Etch for Patterning of Resistive RAM (ReRAM) Devices
Srinivasan, Narasimhan, Rook, Katrina, Berry, Ivan, Rubin, Binyamin, Cerio, FrankVolume:
2
Year:
2017
Language:
english
Journal:
MRS Advances
DOI:
10.1557/adv.2017.23
File:
PDF, 416 KB
english, 2017