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Enabling full-field physics-based optical proximity correction via dynamic model generation
Lam, Michael, Clifford, Chris, Raghunathan, Ananthan, Fenger, Germain, Adam, KostasVolume:
16
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.16.3.033502
Date:
July, 2017
File:
PDF, 3.47 MB
english, 2017