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[IEEE 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Bordeaux, France (2017.5.29-2017.6.1)] 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - In-situ electrical characterization of co-evaporated Zr-V, Zr-Ti and Zr-Co thin getter films during thermal activation
Lemettre, Sylvain, Hammami, Sana, Bosseboeuf, Alain, Coste, Philippe, Moulin, JohanYear:
2017
Language:
english
DOI:
10.1109/dtip.2017.7984502
File:
PDF, 341 KB
english, 2017