[IEEE 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Bordeaux, France (2017.5.29-2017.6.1)] 2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - In-situ electrical characterization of co-evaporated Zr-V, Zr-Ti and Zr-Co thin getter films during thermal activation

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