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Enhanced atomic layer etching of native aluminum oxide for ultraviolet optical applications
Hennessy, John, Moore, Christopher S., Balasubramanian, Kunjithapatham, Jewell, April D., France, Kevin, Nikzad, ShoulehVolume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4986945
Date:
July, 2017
File:
PDF, 3.41 MB
english, 2017