[Computational and Experimental Methods in Structures] Advances in Multiphysics Simulation and Experimental Testing of Mems Volume 2 || Evaluating Gas Damping in MEMS Using Fast Integral Equation Solvers
Frangi, Attilio, Cercignani, Carlo, Mukherjee, Subrata, Aluru, NarayanVolume:
10.1142/p5
Year:
2008
Language:
english
DOI:
10.1142/9781860948633_0005
File:
PDF, 2.13 MB
english, 2008