Resistive Bridging Defect Detection in Bulk, FDSOI and FinFET Technologies
Karel, Amit, Comte, Mariane, Galliere, Jean-Marc, Azais, Florence, Renovell, MichelVolume:
33
Language:
english
Journal:
Journal of Electronic Testing
DOI:
10.1007/s10836-017-5674-9
Date:
August, 2017
File:
PDF, 1.77 MB
english, 2017