In situ measurement of VUV/UV radiation from low-pressure microwave-produced plasma in Ar/O 2 gas mixtures
Iglesias, E J, Mitschker, F, Fiebrandt, M, Bibinov, N, Awakowicz, PVolume:
28
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/1361-6501/aa7816
Date:
August, 2017
File:
PDF, 1.36 MB
english, 2017