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[IEEE 2017 IEEE International Interconnect Technology Conference (IITC) - HsinChu, Taiwan (2017.5.16-2017.5.18)] 2017 IEEE International Interconnect Technology Conference (IITC) - Advanced patterning approaches for Cu/Low-k interconnects
Tsai, C. H., Lee, C. J., Huang, C. H., Wu, Jay, Tien, H. W., Yao, H. C., Wang, Y. C., Shue, S. L., Cao, M.Year:
2017
Language:
english
DOI:
10.1109/IITC-AMC.2017.7968955
File:
PDF, 330 KB
english, 2017