Investigation of Low Off-Angled 4H-SiC Epitaxial Wafers for...

ECS Journal of Solid State Science and Technology 2017 Vol. 6; Iss. 8

Investigation of Low Off-Angled 4H-SiC Epitaxial Wafers for Power Device Applications

Kojima, Kazutoshi, Masumoto, Keiko, Asamizu, Hirokuni, Harada, Shinsuke, Okumura, Hajime
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Volume:
6
Year:
2017
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0221708jss
File:
PDF, 829 KB
english, 2017
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