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[IEEE 2017 17th International Workshop on Junction Technology (IWJT) - Uji, Japan (2017.6.1-2017.6.2)] 2017 17th International Workshop on Junction Technology (IWJT) - Sidewall doping mechanism and doping profile tuning on 3D structure by plasma doping
Wang, Cuiyang, England, Jonathan, Gossmann, Hans, Persing, Harold, Miller, Tim, Gao, Qi, Tang, Shan, Salimian, SiamakYear:
2017
Language:
english
DOI:
10.23919/IWJT.2017.7966515
File:
PDF, 753 KB
english, 2017