[IEEE 2017 17th International Workshop on Junction Technology (IWJT) - Uji, Japan (2017.6.1-2017.6.2)] 2017 17th International Workshop on Junction Technology (IWJT) - Ion implantation technique for conductivity control of GaN
Narita, Tetsuo, Kataoka, Keita, Kanechika, Masakazu, Kachi, Tetsu, Uesugi, TsutomuYear:
2017
Language:
english
DOI:
10.23919/IWJT.2017.7966524
File:
PDF, 390 KB
english, 2017