Analysis on annealing-induced stress of blind-via TSV using...

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Frontiers of Mechanical Engineering 2017 / 7

Analysis on annealing-induced stress of blind-via TSV using FEM

Shao, Jie, Shi, Tielin, Du, Li, Su, Lei, Lu, Xiangning, Liao, Guanglan
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Language:
english
Journal:
Frontiers of Mechanical Engineering
DOI:
10.1007/s11465-017-0457-7
Date:
July, 2017
File:
PDF, 640 KB
english, 2017
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