Utilization of FIB Technique in TEM Specimen Preparation of...

Microscopy and Microanalysis 2015 / 08 Vol. 21; Iss. S3

Utilization of FIB Technique in TEM Specimen Preparation of GaN-based Devices for Dislocation Investigation

Zheng, Jian-Guo, Shao, Zhenguang, Chen, Dunjun
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Volume:
21
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927615010739
Date:
August, 2015
File:
PDF, 206 KB
english, 2015
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