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Genetic algorithm optimization of grating coupled near-field interference lithography systems at extreme numerical apertures
Bourke, Levi, Blaikie, Richard JVolume:
19
Language:
english
Journal:
Journal of Optics
DOI:
10.1088/2040-8986/aa7c7d
Date:
September, 2017
File:
PDF, 2.07 MB
english, 2017