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SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] MOEMS Display, Imaging, and Miniaturized Microsystems IV - New applications for MOEMS
Mounier, Eric, Ürey, Hakan, Dickensheets, David L., de Charentenay, Yann, Eloy, Jean-Christophe, Gogoi, Bishnu P.Volume:
6114
Year:
2006
Language:
english
DOI:
10.1117/12.634755
File:
PDF, 195 KB
english, 2006