Nano-artifact metrics based on random collapse of resist

Scientific Reports 2015 / 5 Vol. 4; Iss. 1

Nano-artifact metrics based on random collapse of resist

Matsumoto, Tsutomu, Hoga, Morihisa, Ohyagi, Yasuyuki, Ishikawa, Mikio, Naruse, Makoto, Hanaki, Kenta, Suzuki, Ryosuke, Sekiguchi, Daiki, Tate, Naoya, Ohtsu, Motoichi
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Volume:
4
Language:
english
Journal:
Scientific Reports
DOI:
10.1038/srep06142
Date:
May, 2015
File:
PDF, 1.50 MB
english, 2015
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