![](/img/cover-not-exists.png)
Investigating the impact of SEM chamber conditions and imaging parameters on contact resistance of in situ nanoprobing
Qu, Juntian, Liu, XinyuVolume:
28
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/1361-6528/aa79ea
Date:
August, 2017
File:
PDF, 2.22 MB
english, 2017