Performance Control of Positive-Working Electron Beam Resists by Copolymerization and Blending
Sugita, Kazuyuki, Ueno, Nobuo, Funabashi, Michimasa, Yoshida, Yasuyuki, Doi, Yasunori, Nagata, Shiro, Sasaki, ShigeruVolume:
17
Journal:
Polymer Journal
DOI:
10.1295/polymj.17.1091
Date:
October, 1985
File:
PDF, 1.37 MB
1985