Microwave plasma generation by the fast rotation and slow...

Japanese Journal of Applied Physics 2017 / 04 Vol. 56; Iss. 4

Microwave plasma generation by the fast rotation and slow pulsation of resonant fields in a cylindrical cavity

Hasegawa, Yuichi, Nakamura, Keiji, Lubomirsky, Dima, Park, Soonam, Kobayashi, Satoru, Sugai, Hideo
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Volume:
56
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.56.046203
Date:
April, 2017
File:
PDF, 1.62 MB
english, 2017
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