![](/img/cover-not-exists.png)
Creation and behavior of radicals and ions in the Acetylene/Argon microwave ECR discharge
Pokorný, Petr, Musil, Jindřich, Novotný, Michal, Lančok, Ján, Fitl, Přemysl, Vlček, JanLanguage:
english
Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201700062
Date:
July, 2017
File:
PDF, 709 KB
english, 2017