Creation and behavior of radicals and ions in the...

Plasma Processes and Polymers 2017 / 07

Creation and behavior of radicals and ions in the Acetylene/Argon microwave ECR discharge

Pokorný, Petr, Musil, Jindřich, Novotný, Michal, Lančok, Ján, Fitl, Přemysl, Vlček, Jan
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Language:
english
Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201700062
Date:
July, 2017
File:
PDF, 709 KB
english, 2017
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