Effects of CH 4 flow ratio on the structure and properties...

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Materials Chemistry and Physics 2017 / 8

Effects of CH 4 flow ratio on the structure and properties of reactively sputtered (CrNbSiTiZr)C x coatings

Jhong, Yu-Siang, Huang, Chih-Wei, Lin, Su-Jien
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Language:
english
Journal:
Materials Chemistry and Physics
DOI:
10.1016/j.matchemphys.2017.08.002
Date:
August, 2017
File:
PDF, 1.96 MB
english, 2017
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