Stand-alone differential capacitance force sensors with...

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Journal of Micromechanics and Microengineering 2017 / 07

Stand-alone differential capacitance force sensors with sub-nano-newton sensitivity

Ye, Jilong, Sun, Taotao, Huang, Dong, Li, Zhihong, Lin, Li
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Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aa81bc
Date:
July, 2017
File:
PDF, 1.22 MB
english, 2017
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