Superconducting Niobium Titanium Nitride Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
Yemane, Yonas, Sowa, Mark J, Zhang, Jinsong, Ju, Ling, Deguns, Eric, Strandwitz, Nicholas C, Prinz, Friedrich (Fritz) B, Provine, JLanguage:
english
Journal:
Superconductor Science and Technology
DOI:
10.1088/1361-6668/aa7ce3
Date:
June, 2017
File:
PDF, 438 KB
english, 2017