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SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 25 June 2017)] Optical Measurement Systems for Industrial Inspection X - Increasing the accuracy of tilted-wave-interferometry by elimination of systematic errors
Lehmann, Peter, Osten, Wolfgang, Albertazzi Gonçalves, Armando, Schindler, Johannes, Pruss, Christof, Osten, WolfgangVolume:
10329
Year:
2017
Language:
english
DOI:
10.1117/12.2270395
File:
PDF, 873 KB
english, 2017