Fabrication of three-dimensional microstructures in...

Fabrication of three-dimensional microstructures in positive photoresist through two-photon direct laser writing

Tsutsumi, Naoto, Fukuda, Asato, Nakamura, Ryotaro, Kinashi, Kenji, Sakai, Wataru
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Volume:
123
Language:
english
Journal:
Applied Physics A
DOI:
10.1007/s00339-017-1170-4
Date:
August, 2017
File:
PDF, 1.37 MB
english, 2017
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