Synergistic enhancement effect between external electric and magnetic fields during high power impulse magnetron sputtering discharge
Li, Chunwei, Tian, Xiubo, Gong, Chunzhi, Xu, Jianping, Liu, ShouxinVolume:
143
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2017.06.007
Date:
September, 2017
File:
PDF, 2.43 MB
english, 2017