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Revisiting the growth mechanism of atomic layer deposition of Al 2 O 3 : A vibrational sum-frequency generation study
Vandalon, Vincent, Kessels, W. M. M. (Erwin)Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4993597
Date:
September, 2017
File:
PDF, 3.10 MB
english, 2017